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石墨烯CVD系統

planarGROW系列石墨烯CVD系統(稍作修改亦可作為CNT的生長系統)是一臥式熱壁反應器系統。 我們提供三種標準系統配置:planarGROW-2B、planarGROW-4S 和 planarGROW-6E。然而,這些標準系統中的每一個系統都可以根據使用者的特定應用要求進行客製化。

規格與說明

石墨烯CVD系統規格

QUARTZ TUBE & FURNACE

     • Tube Dimensions: ф100*1200mm

     • Furnace Body (WxHxD): 500x500x350

     • Heater: Kanthal Wire w/ Glass Wool Molding

     • Maximum Temperature: 1,100°C

     • Thermocouple: K type, ID 6.5 mm

     • Heating Zone: 1-zone, ф100*350mm

     • Linear Motion Control Unit

     • Manual Furnace Door

GAS SUPPLY UNIT

     • Three (3) Celerity TN2900 Mass Flow Controllers

          o Hydrogen (H2), 100sccm

          o Methane (CH4), 200sccm


planarGROW-4S with a 3-zone Furnace

          o Argon (Ar): 1,000sccm

 • Open Mounting Bay for Fourth (4th) MFC

     • ¼” Stainless Steel Tubing

     • Five (5) ¼” Pneumatic-Type Diaphragm Valves

VACUUM & PRESSURE CONTROL UNIT

     • Atovac CG201 Convection Gauge

     • Atovac CG2000 Convection Gauge Controller

     • Atovac ACM200, 10 Torr Capacitance Manometer

     • Atovac ATV1000 Motor-Geared Throttle Valve

     • GPC3000 Pressure & Flow Controller

     • WSAutoma W2V40 Rotary Pump (400 liter/min)

SYSTEM CONTROL UNIT

     • MS Windows XP Pro Embedded PC


Fully Automated PC Control with LabVIEW Front End

          o Intel 3.0Ghz Core2Duo, 2GB Memory

     • PLC Module with National Inst. LabVIEW Interface

     • Samsung E1920R 19” LCD Monitor

SAFETY & COOLING

     • Water Cooled End Flanges

     • Buzzer Alarm & System Error Display

     • Interlock System

DIMENSIONS & UTILITY REQUIREMENTS

     • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)

     • Weight:  ~200kg

     • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A

     • Air: 4-5kgf/cm2, ¼” tube

     • Water: 2-3kgf/cm2, ½” tube

 


planarGROW-2S With Turbo pump



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