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石墨烯CVD系統
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品牌代理

石墨烯CVD系統

planarGROW 石墨烯CVD系統是一臥式熱壁反應器系統,稍作修改亦可作為CNT的生長系統。 我們提供三種標準系統配置:planarGROW-2B、planarGROW-4S 和 planarGROW-6E,也可根據使用者的特定應用要求進行客製化。

規格與說明

石墨烯CVD系統規格

QUARTZ TUBE & FURNACE

     • Tube Dimensions: ф100*1200mm

     • Furnace Body (WxHxD): 500x500x350

     • Heater: Kanthal Wire w/ Glass Wool Molding

     • Maximum Temperature: 1,100°C

     • Thermocouple: K type, ID 6.5 mm

     • Heating Zone: 1-zone, ф100*350mm

     • Linear Motion Control Unit

     • Manual Furnace Door


GAS SUPPLY UNIT

  • Three (3) Celerity TN2900 Mass Flow Controllers 
    • Hydrogen (H2), 100sccm
    • Methane (CH4), 200sccm
    • Argon (Ar): 1,000sccm
  • Open Mounting Bay for Fourth (4th) MFC
  • ¼” Stainless Steel Tubing
  • Five (5) ¼” Pneumatic-Type Diaphragm Valves


VACUUM & PRESSURE CONTROL UNIT

     • Atovac CG201 Convection Gauge

     • Atovac CG2000 Convection Gauge Controller

     • Atovac ACM200, 10 Torr Capacitance Manometer

     • Atovac ATV1000 Motor-Geared Throttle Valve

     • GPC3000 Pressure & Flow Controller

     • WSAutoma W2V40 Rotary Pump (400 liter/min)


SYSTEM CONTROL UNIT

  • MS Windows XP Pro Embedded PC
    • Intel 3.0Ghz Core2Duo, 2GB Memory
  • PLC Module with National Inst. LabVIEW Interface
  • Samsung E1920R 19” LCD Monitor


SAFETY & COOLING

  • Water Cooled End Flanges
  • Buzzer Alarm & System Error Display
  • Interlock System


DIMENSIONS & UTILITY REQUIREMENTS

  • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
  • Weight:  ~200kg
  • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
  • Air: 4-5kgf/cm2, ¼” tube
  • Water: 2-3kgf/cm2, ½” tube

 


planarGROW-4S with a 3-zone Furnace

Fully Automated PC Control with LabVIEW Front End

planarGROW-2S With Turbo pump

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