planarGROW高溫CVD系統是一雙管水平式石英熱壁反應器系統，具有兩個單區爐和一個加熱夾套(用於金屬氧化物的輔助加熱源)、全自PC控制以及autoCON- 2D LabVIEW人性化操作介面。
高階系統規格範例如下：
QUARTZ TUBE & FURNACE #1 (GRAPHENE)
- Quartz Tube Dimensions: ф50(OD)*1100(L)mm
- Water Jacket Vacuum Plugs with Viton O-rings
- Heating Element: Kanthal Wire, Glass Wool Insulation
- K-type Thermocouple; 6.5mm Thermocouple Port
- Heating Zone: 1-zone; 50x150mm; Max. Temp: 1,100°C
- Furnace Dimensions: 300x350x300mm
QUARTZ TUBE & FURNACE #2 (MOS2)
- Quartz Tube Dimensions: ф50(OD)*1100(L)mm
- Water Jacket Vacuum Plugs with Viton O-rings
- Heating Element: Kanthal Wire, Glass Wool Insulation
- K-type Thermocouple; 6.5mm Thermocouple Port
- Heating Zone: 1-zone; 50x150mm; Max. Temp: 1,100°C
- Furnace Dimensions: 300x350x300mm
- Heating Jacket: 50x100mm; Max. Temp: 600°C
GAS SUPPLY UNIT
- Four (4) AtoVac Mass Flow Controllers
- Argon (Ar): 1,000sccm
- Argon (Ar): 200sccm
- Hydrogen (H2): 100sccm
- Methane (CH4): 200sccm
- Open Mounting Bays for fifth (5th) and Sixth (6th) MFCs
- Five (5) ¼” Pneumatic-Type Diaphragm Valves
VACUUM PUMP & PRESSURE CONTROL UNIT
- Atovac CG201-N Convection Gauge
- Atovac CG2000 Convection Gauge Controller
- Atovac ACM200 10 Torr Capacitance Manometer
- Atovac ACM200 1000 Torr Capacitance Manometer
- Atovac ATV1000 Motor-geared Throttle Valve
- Atovac GPC3000 Pressure & Flow Controller
- Iwata or Equivlanet Dry Pump (250 liter/min) w/ Cold Trap
SYSTEM CONTROL UNIT
- Fully automated PC Control via autoCON-2D Software
- MS Windows 7 Embedded PC
- Intel 3.0Ghz Core2Duo, 2GB Memory
- Samsung E1920R 19” LCD Monitor
DIMENSIONS & UTILITY REQUIREMENTS
- Footprint: 1.80m (L) x 1.60m (H) x 1.20m (W)
- Power: 220V, 50/60Hz, 3Φ, 4-wire, 32A
- Water: 2-3kgf/cm2, ½” tube
|
|
planarGROW-2S/2S with a dual furnace
|
Fully Automated PC Control with LabVIEW Front End
|
planarGROW-2S/2S (side-by-side dual tube system for TMD growth)
|
