planarGROW-2S-MoS2 CVD系統規格
QUARTZ TUBE & FURNACE
- Quartz Tube Dimensions: ф50(OD)*1000 mm
- Water Jacket Vacuum Plugs with Viton O-rings
- Heating Element: Kanthal Wire, Glass Wool Molding
- Maximum Temp: 1,000°C, K-type Thermocouple
- Heating Zone: 2-zones, ф50*300mm Each
- Alumina Tray + Wafer Tray for 10x10mm2 Samples
GAS SUPPLY UNIT
- One (1) Celerity TN2900 Mass Flow Controller
- Open Mounting Bay for Second (2nd) MFC
- ¼” Stainless Steel Tubing
- Two (2) ¼” Pneumatic-Type Diaphragm Valves
VACUUM & PRESSURE CONTROL UNIT
- Atovac CG201 Convection Gauge
- Atovac CG2000 Vacuum Gauge & Controller
- GPC3000 Pressure & Flow Controller
- Alcatel Dry Pump (400 liter/m) w/ Cold Trap
SYSTEM CONTROL UNIT
- MS Windows XP Pro Embedded PC
- Intel 3.0Ghz Core2Duo, 2GB Memory
- PLC Module with National Inst. LabVIEW Interface
- Samsung E1920R 19” LCD Monitor
SAFETY & COOLING
- Buzzer Alarm & System Error Display
DIMENSIONS & UTILITY REQUIREMENTS
- Footprint: 1.5m (W) x 1.50m (H) x 0.80m (D)
- Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
- Water: 2-3kgf/cm2, ½” tube
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planarGROW-2B-MoS2 with Touch Screen
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Fully Automated PC Control with LabVIEW Front End |
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planarGROW-2S/2S (side-by-side dual tube system for TMD growth) |
